摘要
磁悬浮技术由于无摩擦、无磨损、无污染、具有高加速度和高速度等突出优点,在当前IC等制造领域具有广阔的应用前景,尤其适用于高真空、高洁净工作环境,新型磁悬浮定位技术成为国内外竞相研究热点。磁悬浮定位平台是一个非线性、多变量、强耦合的控制系统,为了实现控制系统的完全解耦,提高平台的定位精度,在结构、解耦方法和控制方法上,总结了国内外研究学者所做的大量研究,指出磁悬浮定位平台亟需解决的关键核心技术,优化磁悬浮定位平台性能,为IC制造领域的迅速发展提供可借鉴的研究方向。
The magnetic levitation technology has the outstanding advantages such as high acceleration and high speed because it dosen＇t have friction, wear and pollution. This technology has a broad prospect of application in the current IC manufacturing field, especially suitable for vacuum environment. New technology of maglev positioning technology is a research focus in worldwild. Maglev positioning platform is a nonlinear, multivariable and strong coupling control system. In order to realize the complete deeoupling of the control system and improve the positioning precision of the platform, some domestic and international scholars＇ researches were summarized about structures, deeoupling methods and control methods. The technology still had greater optimization space. The key core technology of Maglev positioning platform needed to be settled were pointed out. Providing referential research direction of the rapid development in the IC manufacturing field.
出处
《机床与液压》
北大核心
2017年第7期162-166,113,共6页
Machine Tool & Hydraulics
基金
2013年度高等学校博士学科点专项科研基金项目(20133201130003)
国家863计划(2013AA041109)
关键词
磁悬浮
精密定位
解耦
控制方法
Maglev
High precision
Decoupling
Control methods
