燃烧化学沉积纳米α-Al_2O_3薄膜的相变动力学试验研究

Phase transition dynamics of combustion chemical deposition in preparation of nano α-Al_2O_3 coating

根据燃烧化学沉积法的相变动力学特点,以反应物密度的变化为相变动力学变量,建立了燃烧化学沉积法的相变动力学模型,按照完全燃烧、雾化剂不过量和雾化效果良好的原则,通过初始液体雾化研究和相变动力学实验获得了实现良好雾化效果的实验参数,制备了均匀致密的α-Al2O3纳米陶瓷薄膜,并运用SEM和TEM等分析了α-Al2O3纳米陶瓷薄膜的显微形貌和结构。

The phase transition dynamic model was build up with the reactant consistency as phase transition dynamic variable according to phase transition dynamics of combustion chemical deposition.Based on the principles of complete combustion,no excess atomizing agent and well-atomized effect,the experiment parameters with well-atomized effect was obtained by means of original liquid atomization evaluation and phase transition dynamic experiment.Even and compact α-Al2O3 nano ceramic coating was prepared,the micro structure and the surface topography was also studied by TEM and SEM.