富勒烯(C₆₀)与类金刚石碳复合膜的Debye模型的模拟计算（英文）

Simulating calculation of Debye’s model for the composite films of fullerene (C₆₀) and diamond－like carbon

由 C60和类金刚石碳膜（ DLC）组成的多层复合膜可在 Si、 玻璃和其它衬底上通过真空升华 沉积和随后以 CH4和 H2作为反应剂用射频化学气相沉积（ RFCVD） 的方法制备。这种膜的若干 特征可由拉曼谱（ Raman）表征。复合膜电阻与介电常数由低频（ LF）阻抗分析仪进行研究从而得 到膜电阻、介电常数和频率间的关系。这些结果表明：在各种频率下的此类复合膜的电阻与纯 C60 膜基本一致，但是纯 C60膜随频率变化的电容率与复合膜明显不同。这些现象与结果可通过电 介质的德拜模型和介质松弛理论进行分析与讨论。根据相应的 Debye模型方程式，实验测得的 介电常数和频率间的关系经计算机拟合，得到了复合膜的松弛时间，介电常数等。拟合结果基本 上与实验数据一致。

Multi－ layer composite films consisted of C60 and diamond－ like carbon （DLC） can be pre－ pared on Si, glass and other substrates by vacuum sublimation deposition followed by radio－ frequency chemical vapor deposition （RFCVD） method with the CH4 and H2 gas as the reactants. The films and their characteristics were identified by Raman spectra. The resistivity and dielectric constant of the films were studied by means of a LF impedance analyzer so as to obtain the relationship between the frequency and the dielectric constant and resistivity of the films. The results show that resistivity of the films under the various frequency are approximately consistent with a pure C60 film, but the permittivity varied with the frequency for the pure C60 film is obviously distinguished from the composite films. The phenomena and results were discussed and analyzed by Debye’s model and dielectric relaxation theory. And then according to the corresponding simulating formula, the relationship between the experimental dielectric constant and frequency was fitted by the computer calculation to gain the relaxation time, dielectric constant etc. The fitted results are basically consistent with the experimental data.