影响铝板带表面C元素EDS分析准确度的因素

Factors of Influencing Analysis Accuracy of EDS for Carbon Element on the Aluminum sheets

扫描电镜(SEM)和能谱仪(EDS)的联用可以便捷地实现铝板材的显微组织观察和成分分析,但是EDS会测试出板材表面大量的C元素从而影响了分析的准确性。从板材加工及试样制备、加速电压选择、和峰处理以及定量标准化4方面进行试验及讨论,提出了提高铝板带表面C元素EDS分析准确度的方法。

Scanning electron microscopy （SEM） and energy dispersive spectroscopy （ EDS） are used to realize the microstructure observation and elements analysis of aluminum sheets conveniently. However, a generous amount of carbon will be tested on the sheets by EDS, which could affect the accuracy of analysis. The results show that the preparation of samples, selection of accelerating voltage, identification of sum - peak and quantitative standardization are factors influencing the accuracy of EDS analysis. From these four aspects, the paper put forward methods improving the accuracy of EDS analysis of carbon element after experiment.