AlN陶瓷表面氧化及Mo-Mn法金属化研究

Surface Oxidation and Metallization of AlN Ceramics by Mo-Mn Process

对无压烧结制备的AlN陶瓷氧化处理,采用传统Mo-Mn法在预氧化后的AlN陶瓷表面制备金属化层,并在Mo-Mn金属化层表面实施镀镍制备Mo-Mn/Ni复合金属化层。研究了AlN陶瓷氧化及金属化对其导热性能、力学性能、表面相组成及显微结构的影响。结果表明:氮化铝陶瓷经过1100℃保温3 h的氧化处理之后,在其表面生成均匀分布的氧化铝层,热导率和抗弯强度分别提升了6.2%和26.6%。AlN陶瓷表层制备的Mo-Mn/Ni复合金属化层厚度约为28μm,Al_2O_3层、Mo-Mn层与Ni层之间通过元素的相互迁移形成扩散层,层间紧密结合。金属化后陶瓷的热扩散系数较纯AlN陶瓷基体提升3.8%。

Metallized layer was prepared by normal Mo-Mn progress on the surface of the oxidized AlN ceramics,which were prepared by pressureless sintering method.And the Mo-Mn/Ni composite metallized layer was obtained by plating nickel on the surface of the Mo-Mn metal layer.The effects of oxidation and metallization of AlN ceramics on thermal property,mechanical property,surface phase composition and microstructure were studied.The results show that a uniform Al2O3 layer is prepared on the surface of AlN ceramics after oxidized at 1100 ℃ for 3 h.Thermal conductivity and flexural strength increase by 6.2% and 26.6%,respectively.Mo-Mn/Ni composite metallization layer is generate on the oxidized AlN sample by Mo-Mn progress and electroless plating process.The thickness of the Mo-Mn/Ni composite metallization layer prepared on the suface of AlN ceramic is about 28 μm.The diffusion layer is formed among the Al2O3 layer,Mo-Mn layer and Ni layer through the migration of elements,and the interlayer combinations are tight.The thermal diffusivity increase by 3.8% compared with the AlN ceramic substrate.