摘要
研制高温恶劣环境适用的压力传感器具有重要的工程实际意义。文中设计了以蓝宝石为弹性膜片,溅射合金薄膜为应变电阻的耐高温压力传感器。通过有限元软件计算分析了弹性膜片的应力应变分布,并对膜片厚度进行了优化设计。
The development of high temperature pressure sensor has important practical significance. This paper designs a high temperature pressure sensor including sapphire elastic diaphragm and alloy film strain resistance. By using finite element software, the stress and strain distribution of the diaphragm is analyzed, and the thickness of diaphragm is optimized.
出处
《机械工程师》
2017年第6期33-34,共2页
Mechanical Engineer
基金
北京市优秀人才培养资助青年骨干个人项目(2014000020124G063)
关键词
高温压力传感器
合金薄膜
仿真
high temperature pressure sensor
alloy film
simulation
