摘要
介绍ULVAC IH-860DSI注入机系统的特点及其原理,在介绍其设备的基础上,着重分析这款注入机系统几个重要和特别的组成部分。根据多年的注入机设备维护经验,总结归纳ULVAC IH-860DSI注入机系统的优点和缺点。
This paper introduces the characteristics and principle of ULVAC IH-860DSIC ULVAC Ion Implantation System, on the basis of the introduction of its equipment, it focuses on the analysis of several important and special parts of the ion implantation based on years of equipment maintenance experience, summed up the advantages and disadvantages of the system.
出处
《电子工业专用设备》
2017年第1期19-25,共7页
Equipment for Electronic Products Manufacturing
