波面干涉测量中的可变像差补偿技术

Variable Aberration Compensation Techniques in Wavefront Interferometry

以非球面为代表的复杂面形在现代光学系统中的应用越来越广泛,因为它比球面提供了更多的设计自由度,可用更少的元件达到更优的成像质量。然而非球面的多样性也带来了面形测量的难题,传统的零位测试没有灵活适应不同面形的能力。可变像差补偿技术对于提高检测柔性和效率具有重要意义。针对回转对称非球面的球差补偿,分析了部分补偿透镜、相位板组合和高次非球面单透镜等可变补偿方案;针对离轴非球面的像差补偿,分析了倾斜球面系统、Risley棱镜和双回转相位板的可变补偿方案;进而介绍了变形镜和空间光调制器(SLM)作为可编程补偿器用于波面干涉测量的研究进展。最后指出可变像差补偿技术面临的大范围和多模式像差补偿、回程误差补偿以及失调像差解耦三个主要问题。

Complex surfaces typically including aspheres are more and more widely used in modern optical systems. Better imaging quality can be achieved with fewer elements because aspheres provide more design freedom. However, the variety of aspheres also introduces challenges to surface metrology. Conventional null tests do not have the flexibility to adapt to different shapes. Therefore variable aberration compensation techniques are important to enhance the flexibility and efficiency of testing. The analysis of partial null lens, combination of phase plates and high-order aspherie singlet for variable compensation schemes of spherical aberration of rotationally symmetric aspheres is presented. For aberration compensation of off-axis aspheres, the variable compensation schemes of tilted spherical mirror system, Risley prisms and the counter-rotating phase plates are analyzed. Furthermore, the progress of using deformable mirrors and spatial light modulators （SLM） as programmable compensators in wavefront interferometry is reviewed. Finally, three maior problems in variable aberration compensation techniques are introduced, which are compensation of wide range and multiple modes of aberration, retrace error compensation and decoupling of misalignment-induced aberration.