占空比对多弧离子镀纯Cr涂层表面形貌的影响

Influence of duty cycle on surface morphology of pure Cr coatings deposited by multi-arc ion plating

利用多弧离子镀技术于不同的占空比条件下在锆合金表面制备出纯Cr涂层,采用扫描电子显微镜(SEM)和X射线衍射仪(XRD)分析了纯Cr涂层表面形貌和择优生长取向的变化规律,并利用Image J软件对纯Cr涂层表面的孔隙率进行分析。结果表明:占空比的改变显著影响着纯Cr涂层的微观形貌、择优生长取向和孔隙率。随着占空比的增大,纯Cr涂层的表面大颗粒数目和孔隙率逐渐减少,表面形貌得到改善,同时纯Cr涂层晶体择优生长趋势由(110)晶面转向(200)晶面。

Pure Cr coating was deposited by multi-arc ion plating under different duty cycles on surface of zirconium alloy. Changes of surface micro morphology and preferential growth orientation of pure Cr coatings were analyzed by means of scanning electron microscopy（ SEM） and X-ray diffraction（ XRD）,and porosity of the pure Cr coating was analyzed by using Image J software. The results show that the microstructure,preferential growth orientation and porosity of the pure Cr coating are significantly influenced by duty cycle. As the duty cycle increases,the surface morphology of the pure Cr coating is decreased and the surface morphology is improved,and the crystal orientation（ 110） of the pure Cr coating is turned to（ 200） orientation.