激光诱导背向湿式刻蚀蓝宝石过程中声发射信号检测试验

Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire

利用声发射仪对脉冲光纤激光诱导背向湿式刻蚀蓝宝石的过程进行了试验研究。在激光诱导背向湿式刻蚀蓝宝石的过程中检测到的声发射信号包含丰富的特征信息;利用声发射信号的幅度、能量计数和撞击计数等特征参数对激光诱导背向湿式刻蚀蓝宝石过程进行表征;蓝宝石未被切穿时声发射信号表现为声发射事件少,幅度大(90~100dB),能量计数较大,撞击计数较小;蓝宝石被切穿后声发射信号表现为声发射事件多,幅度小(40~80dB),能量计数基本为0,撞击计数较大。

An experimental study on the process of backside wet etching sapphire induced by pulse fiber laser is carried out by acoustic emission detector. In the backside wet etching sapphire process induced by laser, the detected acoustic emission signal contains a lot of characteristic information. The backside wet etching sapphire process can be characterized by parameters such as amplitude, marse and hit-counting of acoustic emission signal. Before the sapphire is cut through, the acoustic emission signal shows few acoustic emission events, large amplitude of 90- 100 dB, large marse and small hit-counting. After the sapphire is cut through, the acoustic emission signal shows many acoustic emission events, small amplitude of 40-80 dB. Meanwhile, the marse becomes nearly zero, and the hit-counting is large.