基于内模滑模控制法的气体质量流量控制系统的研究

Research on Internal Model Sliding Mode Method in Gas Mass Flow Control System

为了解决当气体质量流量控制器多次快速改变输出流量数值的设定值后,气体质量流量传感器无法迅速响应控制器设定点的快速变化,进而引起该传感器响应迟滞这一问题,对影响气体质量流量控制系统控制性能的因素进行分析,采用一种新的控制方法—内模滑模控制法。从控制器结构出发,分析它的工作原理,利用Simulink对控制系统进行建模仿真,通过与PI算法控制器的对比,分析比较两个控制器对传感器补偿后的系统响应结果,验证新方案的可行性。研究结果表明,这种控制方法响应迅速,控制精度高,提高了系统的稳定性,满足试验测试要求。

In order to solve the problem that while the gas mass flow controller repeatedly changes the output flow value, gas mass flow sensor cannot quickly respond to the rapid change and therefore lead to sensor＇s measurement lag, the factors affecting the control performance of Gas Mass Flow Control System are analysed, and a new method named In- ternal Model Sliding Mode method is adopted. The working principle of controller structure is analysed so as to build model and simulate the control system by Simulink. The feasibility of the new method is verified by comparing re- sponse results of control system with PI algorithm controller. This study results show that the response of new method is more faster, accurate and stable, which means that the new method meets the test requirements.