电子束加工设备高压加速电源的研制

High Voltage Inverter Power Supply for Electron Beam Machine

为获得稳定电子束流输出,提高电子束加工质量,采用AC/DC/AC/DC/AC/DC的拓扑电路结构、双闭环控制电路,研制一种新型高压加速电源。检测分析了高压加速电源空载和带载时,高压变化线性度、逆变功率变压器初级电压、电流波形,实验结果表明:所研制的高压加速电源的高压输出线性度较好,且能满足最大功率输出的需求。

In order to acquire steady output of electron beam and enhance the quality of electron beam machine cthe topology circuit of AC/DC/AC/DC/AC/DC and double closed-loop control circuit has been adopted to manufacture high voltage power souroe.Besides the linearity of output high voltage, the maximal voltage and current waves at original coil of high voltage inverter transformer have been detected.Through a series of tests,the result shows that not only the output of the high voltage power source has a fine linearity, and it can meet the maximum beam output.