高分辨激光显微测量系统的应用

The Application of High-resolution Laser Micro-survey System

高分辨显微测量系统在观察样品表面细微结构和普通光学难以分辨的极限尺寸样品的测量中实现了高分辨、高精度和自动化的综合显微分析。文中采用激光光源提高显微测量精度,并消除了激光散斑的影响,采用高分辨CCD工业相机对光盘的道间距及表面参数进行了实时显微测量分析。

High resolution microscopic measurement system makes the comprehensive microscopic analysis with high-delinition resolution, high precision and automation come true, especially in the observation of the surface structure and the sample measurement that ordinary optical method is difficult to distinguish the limiting size.It enhances the measurement accuracy by using laser light, and eliminates the effect of laser speckle, meanwhile measures the track pitch and surface parameters of compact disc with help of high resolu-tion CCD industrial camera.