基于DSP的直流磁控溅射电源设计

Design of DC magnetron sputtering power supply based on DSP

该文通过研究磁控靶工作时的负载特性,设计了以全桥逆变开关电源技术为基础的高效、大功率磁控溅射电源。利用Matlab搭建的模型对电路的参数、输出波形进行了仿真,在仿真的基础上完成了主回路、控制电路硬件及软件程序的设计及样机测试,并在JTP-1400型磁控溅射镀膜机上进行了实验。实验结果证实该电源具有恒流控制效果好,电流截止负反馈反应迅速,工作稳定等优点。

In this article magnetron regulated power supply with high power and high efficiency is de- signed on the basis of the full bridge inverter switching power supply technology after studies the load characteristics of magnetron target. A simulating model is composed with MATLAB to study the parame- ters and the waveforms of the designed circuits, the hardware circuit and the software program are de- signed on the basis of simulation results. The prototype of power supply is tested. The power supply has experimented on the type of JTP - 1400 magnetron sputtering coating machine, the experimental results confirm that the power supply has good constant current control effect, fast response of current cut - off negative feedback and work stability etc.