CMOS电路中的漏电失效分析

Analysis on Leakage Current Failure in CMOS Circuits

在嵌入式存储器以及Logic、Analog等CMOS工艺中,漏电失效分析技术广泛应用。这里介绍了漏电失效分析流程、CMOS电路中的漏电测试项目、漏电失效分析工具,并通过具体案例,对漏电失效分析在CMOS工艺良率提升以及新产品导入上的应用作了详细阐述。

Leakage failure analysis are widely used in CMOS circuits, such as Nonvolatile Memory, logic IC, analog IC and so on. This paper first introduces the concept of failure analysis flow, leakage testing items in CMOS IC, and several failure analysis tools. Finally several representative cases have been introduced in the article, which represent typical application of leakage failure analysis in yield improvement and new product introduction.