双层纳米薄膜微管与弹簧的制备与研究

Preparation and research of bilayer nanomembrane microtube and spring

利用卷曲纳米技术,制备了Ti/Cr、Cr/SiO、SiO/SiO_2、SiO/Cr 4种不同金属、氧化物组合的双层纳米薄膜微管,研究了不同组合和参数对微管结构的影响,结果表明纳米薄膜沉积温度、沉积速率和纳米薄膜的厚度以及材料本身的物理性质等因素对微管的半径大小影响显著。利用Ti/Pt双层纳米薄膜微管结构制备的催化微马达在H_2O_2溶液中依靠气泡推动,表现出超快的速度和强大的推动力,在靶向给药、人工智能机器人、生物传感等领域具有应用潜力。另外,通过斜掠角蒸渡和纳米卷曲技术结合,制备了另外一种三维结构-不同螺旋角的Ti金属弹簧。

Four different types of Ti/Cr,Cr/SiO, SiO/SiOz, SiO/Cr bilayer nanomembrane microtubes composed of mental and oxide were prepared by roll up nanotechnology. The influence of different material combination and parameters on microtube structure were studied. The results indicated that deposition temperature, deposition rate, the thickness of nanomembrane and physical properties of materials significantly influenced the diameter of microtubes. Catalytic micro engines were prepared by Ti/Pt microtubes. The Ti/Pt microengines showed superfast velocity and a powerful driving force,the motion and trajectory of microengines were recorded by a high-speed camera. The Ti/Pt microengines had the ap- plication potential in fields of drug-delivery,intelligent robot and biosensing. In addition, another 3D structure-spring with different spring angle which combined by roll-up nanotechnology and GLAD （glancing angle deposition） was prepared.