摘要
A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.
A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.
基金
Project supported by the National Natural Science Foundation of China(Grant No.61505074)
the National Basic Research Program of China(Grant No.2013CBA01703)
the Hong Liu Young Teachers Training Program Funded Projects of Lanzhou University of Technology,China(Grant No.Q201509)
the National Undergraduate Innovation Training Program of China(Grant No.201610731030)
