纳米压电-声学-热学显微术及其应用研究

Study on Microtechnic and Application of Nanoscale Piezoelectricity,Acoustics,Thermotics

在原子力显微镜(Atomic force microscope,AFM)基础上发展起来的扫描探针显微术(Scanning probe microscope,SPM)已成为推动当今纳米科学发展的最重要技术,综述了在商用AFM平台上所发展的超高分辨压电响应力显微术(PFM)、低频高分辨扫描探针声学显微术(SPAM)、三倍频双探针扫描热学显微术(3ω-STh M)等先进扫描探针显微术的工作原理及其应用研究,显示了该先进扫描探针显微术在纳米结构及其与外场互作用的机电、弹性、热学、热电等综合物理特性原位表征的重要潜力。

Developing based on atomic force microscope scanning, probe microscope is now one of the most important tools in nanoseale science and technology. Ultrahigh resolution piezoresponse force microscopy （PFM）, scanning probe acoustic microscopy （SPAM） and 3ω-scanning thermal microscopy （3ω-SThM） developed based on the commercial atomic force microscope （AFM） were reviewed. Their basic principle and applications were described as well. PFM, SPAM and SThM indicate an important potential for this advanced scanning probe microscopy in nanostructures interacted with external field electromechanical, elastic and thermal and thermoelectric properties.