C_(PK)在集成电路测试行业中的应用

Application of C_(PK) in Testing of Integrated Circuits

制程能力指数(C_(PK))能反映测量系统处于稳定状态下的实际加工能力,分析评估过程的稳定性和控制能力,它是现代企业用于表示制程能力的指标,实质作用是反映制程合格率的高低。以晶圆级测试数据为例,使用MINITAB 16软件,将C_(PK)应用到集成电路测试行业中,首先对数据进行正态性检验,对符合正态分布的数据进行控制图分析,查看测试过程是否稳定、受控。最后,通过Capability Sixpacks工具考察处在稳定状态下的测量系统在某multi-site测试下的实际加工能力,并根据C_(PK)五个等级标准,在管理上作出相应的判断和处置,判断是否需要改善制程,为确保产品质量和测试稳定性提供了一种有效方法。

Process capability index,briefly called Cpk ,can reflect the capability in actual process when the measurement system is in the steady state,and can analyze the stability and control the process. Cpk ,as the index to express the process capability,is used to reflect the level of the qualified rate of the process. The paper takes wafer level test data as an example and applies the Cpk to the testing of integrated circuits by MINITAB16 to analyze the data of multi-site test to identify the major sources of error. We need check whether the data is consistent with the normal distribution, or the process is stable. Then its actual processing capacity in the steady state is investigated to make corresponding judgment and disposition in management according to the five levels of standards of Cpk . It provides an effective mean to verify the stability of the measurement system and ensure the quality and reliability.