摘要
t-EBSD技术是自2012年发展起来的新兴测试技术,本文介绍了t-EBSD测试分析技术的原理,总结了tEBSD技术在材料学中的应用及其与其它分析测试技术结合的应用研究,并展望了t-EBSD技术研究应用的发展趋势。目前,t-EBSD技术主要用于超细晶粒、大形变量金属、氧化物薄膜等研究,未来t-EBSD技术将会与多种分析技术相结合,从而扩大高分辨微观晶体结构分析的应用范围。
The t-EBSD technique was proposed since 2012. In this paper, the principle of t-EBSD was introduced. The t- EBSD used in the materials science and the application of this technique combined with other techniques was concluded. Meanwhile, the future research of t-EBSD was proposed. At present, the t-EBSD was used in the research areas such as the super-fined grains, the large-variable metals and oxide film. In the future, the t-EBSD will be combined with more analytical techniques, and the applied range of the high resolution micro crystal structure analysis will be expanded.
出处
《世界科技研究与发展》
CSCD
2017年第2期134-138,共5页
World Sci-Tech R&D
基金
国家自然科学基金(51301212)资助
关键词
t-EBSD
高分辨率
微区分析
晶体结构
取向
t-EBSD
high resolution
micro-area analysis
crystal structure
orientation
