摘要
A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100μm field of view（FOV）is designed and is working at 13.5 nm.Meanwhile,a CCD is used as a detector with a pixel size of 13μm×13μm and imaging area of 13 mm×13 mm.The imaging quality with tolerances of system and errors of mirrors are considered.We obtain that the best on-axes object resolution can be up to about 200 nm,the average value is 230 nm,and the resolution is about 360 nm at 80μm FOV.
A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100μm field of view（FOV）is designed and is working at 13.5 nm.Meanwhile,a CCD is used as a detector with a pixel size of 13μm×13μm and imaging area of 13 mm×13 mm.The imaging quality with tolerances of system and errors of mirrors are considered.We obtain that the best on-axes object resolution can be up to about 200 nm,the average value is 230 nm,and the resolution is about 360 nm at 80μm FOV.
基金
supported by the National Natural Science Foundation of China(Nos.11443007 and 11505129)
the National Key Scientific Instrument and Equipment Development Project(Nos.2012YQ13012505 and2012YQ24026402)
