液晶玻璃基板表面及内部缺陷检测设备光学原理

The Optical Principle of Inspection Machine for TFT-LCD Glass Surface and Inner Defects

液晶玻璃基板厂家向下游厂家供货时,所供玻璃必须经过严格的品质检测。品质检测中很重要的一项是玻璃表面及内部缺陷的检测,检测项目包括缺陷在玻璃厚度方向的位置、尺寸、种类,自动检测设备根据这些检测出的缺陷特征来判断玻璃的品质优劣。本文分析了检测设备不同的光源和相机布置条件下,玻璃不同位置缺陷的光学成像结果的不同,为检测设备的研发提供参考。

When TFT - LCD bare glass factories give their prod-uct to their customer,all glass must be severely inspected. There is a important item in quality inspection. It is glass surface and inner defects inspection which includes the defect？ s position in glass thickness direction, dimention, type. Normally, the auto in-spection machine in glass production line judges the glass quality by these features. This article analyses the difference of the opti-cal image which is produced bythe inspection machine that uses different layout of light source and camera to inspect the defect ofdifference position of glass. This article can provide some refer-ences for the research and development of inspection machine.