电子级过氧化氢水溶液制备技术进展

Progress in preparation technique of electronic grade hydrogen peroxide aqueous solution

简要介绍了电子工业用高纯过氧化氢水溶液的应用、现状和杂质来源。综述了通过吸附、离子交换、膜分离、精馏、萃取和结晶等单一单元操作纯化制备高纯过氧化氢水溶液技术,并进行优劣势比较。指出当前高纯过氧化氢水溶液制备技术的发展趋势是单元操作集成,重点介绍了使用较为广泛的"吸附–离子交换–膜分离单元操作集成技术"制备高纯过氧化氢水溶液的工艺。

The application, current situation and impurity source of high purity hydrogen peroxide aqueous solution used for electronic industry are briefly introduced. The techniques for preparing high purity hydrogen peroxide aqueous solution using the single unit operation such as adsorption, ion exchange, membrane separation, rectification, extraction, crystallization and so on are reviewed, and their advantages and disadvantages are compared. It is pointed out that the current development trend of preparation technique of high purity hydrogen peroxide aqueous solution is integration of above mentioned unit operations. The processes for preparing high purity hydrogen peroxide aqueous solution using the widely used ＂adsorption-ion exchange-membrane separation unit operation integration technique＂ are emphatically introduced.