PLD制膜过程中等离子体羽辉演化的模拟

Simulation of the development of plasma plume generated by pulsed laser deposition of thin film

在建立脉冲激光沉积综合统一理论模型的基础上 ,进一步研究了制备KTa0 .65Nb0 .3 5O3 (KTN)薄膜过程中等离子体的空间演化规律 .用有限差分法得到了等离子体的速度在等温阶段和绝热阶段两个阶段的演化规律 ,并对这两个阶段粒子速度空间演化的物理机制进行了深入讨论 。

Based on the integrated theoretical model for pulsed laser deposition of KTa 0.65 Nb 0.35O 3 (KTN) thin film, the plasma generated by pulsed laser is studied. The velocity development of particles in plasma was discussed in isothermal and adiabatic expansion process. The physical mechanism of plasma expansion process was described. The theoretical results were compared with our experiments and other authers' conclusions.