通过磁控溅射金属钛生长金红石型二氧化钛纳米片阵列应用于钙钛矿太阳能电池（英文）

Rutile TiO_2 Nanosheet Arrays Planted on Magnetron Sputtered Ti Metal Layers for Efficient Perovskite Solar Cells

本文首次通过磁控溅射方法,在FTO表面溅射一层Ti金属层,结合水热反应,原位生长TiO_2纳米片阵列(TiO_2 NSAs).经过退火处理,Ti金属层转变为致密的TiO_2层,因此基于此方法制得的金红石型TiO_2 NSAs与FTO基底具有很强的结合力.与通过原子层沉积(ALD)以及悬涂(SC)法所得的另外两种TiO_2致密层生长的TiO_2 NSAs对比发现,基于本文所述方法制备的TiO_2 NSAs作为支架层的钙钛矿太阳能电池具有最佳性能.上述结果主要是由于该TiO_2 NSAs无明显缺陷,并且在TiO_2 NSAs/TiO_2致密层/FTO界面接触很好.值得注意的是,通过优化实验条件,基于此种TiO_2 NSAs的钙钛矿太阳能电池的最高光电转换效率可达11.82%.

In this work, vertical rutile titanium oxide（TiO2） nanosheet arrays（NSAs） were firstly hydrothermally grown on the top of thin titanium（Ti） metal layers which were loaded on fluorine doped tin oxide（FTO） substrates by the DF magnetron sputtering deposition method. After an annealing post-treatment, the Ti metal layers were transformed into the compact TiO2 layers with a strong connection between the rutile TiO2 NSAs and the FTO substrates. For comparison, the rutile TiO2 NSAs were similarly planted over two compact TiO2 layers fabricated through atomic layer deposition（ALD） and spin coating（SC） methods, respectively.When served as the scaffold layers in perovskite solar cells（PSCs）, the Ti-based TiO2 NSAs showed the best cell performance due to the high quality of the TiO2 NSA nanostructure and excellent interface contacts among the TiO2 NSAs/TiO2 compact layers/FTO substrate interface. Significantly, a highest cell efficiency of 11.82% was obtained after careful modification on the organization procedures for the PSC devices.