0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12)薄膜的制备及电学性能的研究

The Study on Preparation and Electrical Properties of 0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12) Thin Films

采用溶胶-凝胶法在(111)Pt/Ti/SiO_2/Si衬底上制备了0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12)(0.5LFCO-BTO)薄膜。X射线衍射分析表明薄膜为纯相层状钙钛矿结构,扫描电子显微镜显示薄膜结晶度良好且无裂缝,粒径为100~400nm。0.5LFCO-BTO薄膜在室温条件下呈现出良好的铁电性能,其剩余极化值2Pr和矫顽场2Ec分别为48μC/cm2和290kV/cm。在频率为10kHz下,其相对介电常数εr和介电损耗tanδ分别为218.7和0.015。

0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12)(0.5LFCO-BTO)thin films were prepared via a sol-gel process on(111)Pt/Ti/SiO2/Si substrates.The X-ray diffraction analysis indicates that the films have a single-phase layered perovskite structure.And scanning electron microscopy shows that the 0.5LFCO-BTO films exhibit a fine crystallinity without cracks,the grain size of the films is mainly distributed in the range from100 to 400nm.At room temperature,0.5LFCO-BTO films present good ferroelectric properties with the remnant polarization 2Prof 48μC/cm^2 and the coercive field 2Ecof 290kV/cm,respectively.At frequency of 100 kHz,the dielectric permittivityεrand dielectric loss tanδare 218.7and 0.015,respectively.