Micro thermoplastic forming of a Pd-based metallic glass:theory and applications

Metallic glasses（MGs）are considered as the ideal materials for miniature fabrication because of their excellent micro thermoplastic forming ability in the supercooled liquid region.The understanding and controlling of micro filling process are fundamental for miniature fabrication and their applications,yet presently remain unresolved issues.A universal kinetic equation was proposed to describe the filling kinetics of viscous metallic glass supercooled liquid in micro molds with general cross sectional shapes by using a Pdbased MG as the modeling material and a series of potential applications based on the micro thermoplastic forming of the MG were developed.