脆性材料亚表面损伤检测研究现状和发展趋势

Review on Brittle Material Subsurface Damage Detection Technology

脆性材料加工过程中引入的亚表面损伤,对材料的使用寿命、性能、下道工序的移除量等都有很大的影响。为了指导加工工艺,加强对加工过程的控制,对材料的亚表面损伤层的检测显得尤为重要。从破坏性检测技术和非破坏性检测技术两种不同类型的亚表面损伤层检测方式、理论模型预测和亚表面损伤检测方法的应用效果对比四个方面进行阐述和分析,对不同的检测方式进行比较,并说明其原理、优缺点及应用范围,最后对该领域科学研究的发展现状进行了总结和今后的发展趋势进行展望。

Subsurface damage which is generated during processing of brittle materials has a significant impact on the material of life, property and the mass of removals in the next step. The detection of subsurface damage is very important for guiding the process and strengthening the control of process. The four aspects, including destructive detection technology, non-destructive detection technology, theoretical model predictions and comparison of the application effects of subsurface damage detection method, are elaborated and analyzed. Different detection methods are compared. Its principles, advantages, disadvantages and applications are illustrated. The present situation of scientific research in this field is summarized and the future development trend is prospected.