用于ICF的非晶SiC微球制备及微观结构研究

Fabrication and Microstructure Study of Amorphous SiC Microsphere for ICF

以四甲基硅烷、反式二丁烯和氢气为工作气源,采用化学气相沉积-高温热解法成功制备了壁厚约21μm的非晶SiC微球。利用能量色散X射线光谱仪、X射线光电子能谱仪、X射线衍射仪、Raman光谱仪、扫描电子显微镜、白光干涉仪和X射线照相机对SiC微球的化学成分、结晶状态、表面形貌与粗糙度以及密度与球形度等进行了测量和分析。结果表明:在无氧环境下,通过450~900℃的高温热解及致密化可将在聚α甲基苯乙烯芯轴上沉积的掺硅碳氢聚合物涂层转变成致密的SiC微球。SiC微球呈非晶态,其C/Si原子比约为1.3,主要含有C—Si键和C=C键,微观结构呈无规则状且颗粒分布均匀,密度、球形度和壁厚均匀性分别为2.62 g/cm^3、99.8%和96.8%。

The amorphous silicon carbide （SIC） microsphere with wall thickness of about 21 μm was successfully fabricated by chemical vapor deposition-pyrolysis, using TMS＋T2B＋-H2 as the precursor gases. The chemical composition, structure and prop- erties of SiC microsphere were studied by energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, Raman spectroscopy, scanning electron microscopy, white light interferometer and X-ray camera. The results show that the silicon doped carbon-hydrogen polymer coating deposited on PAMS can be converted to dense SiC microsphere via the pyrolysis and densification process during 450-900 ℃ in the anaerobic environment. The fabricated SiC microsphere is amorphous and it mainly contains C--Si bonds and C=C bonds with C/Si atomic ratio of about 1.3. The microstructure of SiC is irregular and its particle distribution is uniform. In addition, it found that the density, spherical degree and wall thickness uniformity of SiC is also micro- sphere are computed to be 2.62 g/cm3 , 99.8% and 96.8%, respectively.