飞秒激光制作的高灵敏度光纤传感器

High Sensitivity Fiber Sensor by Femtosecond Laser Micromachining

为了实现高精度温度和应力测量,利用波长为800nm的飞秒激光脉冲在单模光纤上加工一种偏微腔结构,制备出一种光纤温度和应力传感头。理论分析了利用该结构实现温度和应力测量的工作机制。利用该结构进行了温度与应力传感实验。实验结果表明环境温度传感灵敏度为54.29 pm/℃,轴向应力传感灵敏度为1.1 pm/με。这种光纤传感器具有体积小、结构简单、灵敏度高的特点。

To realize high-precision temperature and stress stress sensor is fabricated by femtosecond laser micromachining. measurement, a new type of fiber temperature and The femtosecond laser with wavelength of 800nm is employed to ablate a micro-cavity on single mode fiber, which fabricates a new fiber temperature and stress sensor probe. The operation mechanisms of the temperature and stress measurement by the fiber micro-cavity structure are theoretical analyzed. The sensing experiments of the ambient temperature and the axial stress measure are finished. The experimental results show that the temperature sensitivity is 54. 29 pm/℃ and the stress sensitivity is 1.1 pm/με.