利用功率谱密度评价离子束抛光光学元件表面粗糙度

Using the power spectral density to evaluate the surface roughness of optical element ion beam polishing

利用功率谱密度(PSD)评价光学表面粗糙度具有传统评价手段(Ra)所不具备的优势。给出了功率谱密度的计算方法,以及抽样方向与一维PSD曲线的关系。在离子束抛光K9玻璃实验中引入PSD曲线,以评价抛光光学零件的光学表面粗糙度,结合PSD曲线与Ra值能够更全面的指导光学加工。

Using the power spectral density （PSD） to evaluate the optical surface roughness has an advantage over the traditional means of root mean square error （Ra）. The PSI） calculation method and the sampling direction relation with one-dimensional PSD curve are presented. In the ion beam polishing experiment of K9 glass, the optical surface roughness before and after polishing is evaluated by the PSD curve, therefore, the Ra value combined with the PSD curve can be more comprehensive guide in optical processing.