高纯气体中微量或痕量杂质的分析方法

Analytical Methods of Micro or Trace Impurity in High Parity Gases

随着工业产能的不断释放,高纯气体的纯度与产品的质量之间的关系逐渐凸显,引起了科研工作者的广泛关注,因此高纯气体中微量或痕量杂质的分析测定是一个重要的问题。本文介绍了用于高纯气体中微量或痕量杂质的四类分析方法:通用的气相色谱法,特别强调了氦离子化检测器和脉冲放电氦离子化检测器的重要性;痕量水的测定;痕量氧的测定;气相色谱-质谱联用。

With the continuous release of industrial capacity, the relationship between the quality of the product andthe purity of high purity gases becomes evident, and it causes the wide attention of research workers, thus thedetermination analysis of trace and trace impurities in high purity gases is an important issue. Four class analyticalmethods for the use of analysis micro or trace impurity of high purity gases were introduced： general method of GC,especial emphasize the importance of HID and PDHID, the determination of trace water, the determination of traceoxygen, gas chromatograph-mass spectrometry.