摘要
本文介绍了一种用于太阳能电池板表面质量检测的三维形貌测量仪,重点介绍了基于白光显微干涉和双衍射光栅激光位移计量的垂直扫描系统和计算机信息处理系统的结构组成与工作原理。通过采用该测量仪对标准单刻线样板和A级多晶硅片表面进行比对实验,验证了太阳能电池板表面形貌测量仪所能达到的精度。
3D surface morphology measuring instrument is introduced in the paper. It can detect the solar cell panel surface topography. The structure and working principle of the vertical scanning system based on the white light interference -and the double diffraction grating laser displacement measurement are introduced. Working principle of information acquisition system is also introduced. And a comparison test between the standard single line model and grade A polycrystalline silicon wafer is performed. The test results show the accuracy of the measuring instrument.
出处
《洛阳理工学院学报（自然科学版）》
2017年第2期48-51,共4页
Journal of Luoyang Institute of Science and Technology：Natural Science Edition
基金
河南省科技攻关项目(132102210046)
关键词
表面形貌
白光干涉
双衍射光栅
压电陶瓷
柔性铰链
surface topography
white light interference
double diffraction grating
piezoelectric ceramic
flexible hinge
