基于纳秒激光的316L不锈钢直写微细沟槽实验研究

Experimental Study on 316L Stainless Steel Direct Writing Micro Grooves Based on Nanosecond Laser

针对在几十微米尺度下纳秒激光直写法制造微流道的问题,研究纳秒激光加工工艺参数与微流道宽度和深度的关系,利用光纤激光器在316L不锈钢上进行微流道直写实验研究,得到了激光功率、扫描速度、激光频率、激光重复次数与微流道尺寸形貌的关系。实验结果表明,当激光功率为16W,扫描速度200mm/s,频率为40kHz,脉冲宽度为30ns时,实验结果最好,该参数为最佳激光工艺参数范围。同时,验证了小能量激光表面浅熔机理对沟槽底部抛光的可行性。

For making micro channel laser direct writing method, to study the relationship between laser processing parameters and micro channel width and depth of the micro channel, experimental study on direct writing on 316L stainless steel using fiber laser, the relationship between the ｜aser power and scanning speed, get the laser frequency, laser repetition frequency and micro channel depth. The experimental results show that when the laser power is 16W, the scanning speed is 200 mm/s, the frequency is 40kHz and the pulse width is 30ns, the experimental results are the best. At the same time, the surface shallow melting mechanism is proved the feasibility of the groove at the bottom of the polishing.