沉积温度对化学气相沉积铼涂层性能的影响

Effect of Deposition Temperature on Properties of Rhenium Coatings Prepared by Chemical Vapor Deposition

利用五氯化铼热分解反应,采用冷壁式现场氯化化学气相法在钼基体沉积铼涂层,分析不同沉积温度对铼涂层的物相组成、沉积规律、表面形貌、密度和硬度的影响。实验结果表明:沉积所得均为纯铼涂层,晶粒生长方向均以(002)晶面为主;随着沉积温度的上升,铼涂层的沉积速率和沉积效率大幅提升,表面形貌由复杂多面体态变为六棱锥状;涂层组织致密,相对密度最高可达99.9%,维氏硬度随沉积温度升高而升高,最高达6100 MPa。

Rhenium coatings were prepared by cold-wall chemical vapor deposition on the molybdenum matrix using ReCI5 heat decomposition reaction. The effect of deposition temperature on phase composition, deposition rule, surface morphology, density and hardness were studied. The results show that all of the as-prepared coatings have a strong preferential growth orientation of （002）. With the increasing of deposition temperature, the deposition rate and efficiency rapidly increase. Meanwhile, the topography of CVD Re coatings changes from complicated polyhedron to hexagonal pyramid. All the coatings are quite dense and the relative density can reach to 99.9%. Vickers hardness increases with the deposition temperature increasing and it can be up to 6100 MPa.