空心激光辐照薄膜产生温度场与应力场的数值模拟与分析

Numerical Simulations of Temperature Field and Stress Field Generated by Hollow Laser Irradiating Films

为了考察空心激光辐照下膜层的温度场及应力场的分布特征,基于传热学及弹性力学理论,建立空心激光与膜层相互作用的热应力模型。利用有限元数值分析方法求解物理模型,通过对数值结果的分析,可以得出随着激光能量的增强,温升增大,其应力也随之变大的特征及变化规律。其结果可为激光与光学薄膜相互作用提供一定的理论依据。

In order to investigate the distribution characteristics of temperature field and stress field of the film irradiated by laser,the thermal stress model of the interaction between the laser and the film system is established based on the theory of heat transfer and elastic mechanics. The finite element method is used to solve the physical model. By analyzing the numerical results,the following law is obtained. With the increase of laser energy,the temperature rise increases,and the stress of the laser becomes larger. The results can provide some theoretical basis for laser induced damage of optical thin films.