光场式时栅传感器信号产生与采集的硬件系统设计

Hardware System Design of Signal Generation and Acquisition of Optical Field Type Time Grating Sensor

针对传统光学位移传感器的制造设备昂贵及时栅传感器中存在的抗电磁干扰能力差、制造精度不高等问题,设计了一种基于交变光场时空耦合和光刻技术的光场式时栅传感器。根据光场式时栅传感器测量系统的要求,利用DDS技术生成了光场式时栅的激励信号,并完成了LED光源的驱动电路设计,得到了时栅的交变光场信号;设计了基于硅光电池的光信号采集及调理电路,获得了一路用于位移测量的电行波信号。实验表明:该系统能够稳定工作,在108 mm的测量范围内,光场式时栅的测量精度为±0.5μm。

In view of the manufacturing equipment of traditional optical displacement sensor was expensive, and the existing field type time grating had the weakness of poor ability to resist electromagnetic interference and low manufacturing precision, this paper designed a new kind of time grating displacement sensor which joined alternating light field time-space coupling with lithography technology.According to the requirement of the optical field type time grating sensor measurement system, the excitation signal of the optical field type time grating was generated by the DDS technology, and the driving circuit design of LED was completed, and the alternating light field signal of the time grating was obtained.Then, optical signal acquisition and conditioning circuit based on silicon photo cell was designed, and the traveling wave signal which was used to displacement measurement was achieved.Experimental results show that the system can work stably, and measurment accuracy of optical field type time grating can reach to ±0.5μm within measurement limits of 108 mm.