陶瓷压阻式机油压力传感器研制

Development of a ceramic piezoresistive oil pressure sensor

针对传统滑线式机油压力传感器不足,设计制作了一种陶瓷压阻式机油压力传感器。利用自搭建的温度压力测试系统对其进行了标定与测试,实验结果显示:其综合检测精度(线性、迟滞、重复性等)达到0.925%F.S.,完全符合压力传感器通用技术条件规定的综合误差≤2%F.S.的要求,并通过了2~3倍量程的过载、爆破压力测试,性能稳定可靠。加之陶瓷芯片具有耐腐蚀、抗磨损、成本低廉等优点,该传感器可广泛应用于机油压力及其他相关场合的压力检测中。

Aiming at the shortcomings of traditional sliding line oil pressure sensors, a ceramic piezoresistive oil pressure sensor is designed and fabricated. A temperature- pressure measuring system is built, by which the sensor is calibrated and tested. And the test results show that the comprehensive measuring accuracy （linearity, hysteresis, repeatability, etc.） of the sensor is 0.925%F.S., which is fully in accordance with the global error requirements of the general technical specifications for pressure sensor （〈2%F S.）. Moreover, the reliability and stability of the sensor are verified by overload and burst tests of 2-3 times full scale pressure. Combined with the advantages of corrosion resistance, wear resistance and low cost of the ceramic, the sensor could be widely used in pressure measurement of the engine oil and other relevant occasions