摘要
采用主从式结构,设计了一种晶体生长炉用大电流电源。每条支路分别为系统提供电流,通过汇流排把每条支路电流汇总后为晶体生长炉工作提供相应电流。每条支路采用PID算法控制PWM模块的输出电压,保证了每条支路输出电流的一致性,符合电源并联均流的要求。系统经过测试,该电源每条支路输出的电流稳定可靠、误差小,能够满足晶体生长炉工作对电源的要求。
A high-current power supply for crystal growth furnace is designed by using the master-slave structure. Each branch provides the current for system. It can provide operating current for the crystal growth furnace after the flow of each branch by bus bar. Each branch uses the PID algorithm to control the output voltage of the PWM module. This can ensure the consistency of the output current of each branch. It can meet the requirements of the parallel current sharing. The test shows that the output of each branch of the power supply is stable and reliable, and the error is small. It can meet the requirement of power supply for crystal growth furnace.
出处
《实验室研究与探索》
CAS
北大核心
2017年第4期60-63,共4页
Research and Exploration In Laboratory
基金
江苏省青蓝工程资助项目(苏教师(2016)15号)
江苏省高校优秀中青年教师和校长境外研修计划资助项目(苏教师(2014)22号)
关键词
晶体生长炉
大电流
并联
均流
crystal growth furnace
high-current
parallel
sharing
