凸非球面无光焦度双透镜Hindle检验研究

Hindle testing of convex aspheric double-lens with zero-focal power

为实现小口径Hindle透镜对大口径凸非球面的高精度检测,提出了一种新的凸非球面无光焦度双透镜Hindle检验方法,通过加入无光焦度校正透镜有效解决了传统Hindle检验的不足。对口径180 mm、半径380 mm、偏心率2.8的凸非球面进行了设计分析,分别给出了不同光焦度分配及不同无光焦度双透镜间距时系统的残余波像差曲线图,得出较优的系统残余波像差为0.0006λ,验证了该方法的可行性。

In order to realize high precision measurement of large aperture convex aspheric surface with small aperture Hindle lens, a new Hindle testing method of convex aspheric double-lens with zero-focal power is proposed. The shortcomings of traditional Hindle testing are solved effectively by adding correction lens with zero-focal power. The design and analysis of the convex aspheric surface with the aperture of 180 mm, radius of 380 mm and eccentric ratio of 2.8 are carried out. The residual wave aberration curves of the system are given respectively with different focal power distribution and different distances between two lenses with zero-focal power. A better system residual wave aberration of 0.0006fl is obtained, and feasibility of the method is verified.