基于后焦面成像的聚合物平面波导光学参数测量仪

Polymer planar waveguide parameter measuring instrument based on back focal plane imaging

基于后焦面成像确定波导传播特性的基本原理,结合平面波导中的菲涅尔反射理论,设计了一种聚合物平面波导光学参数测量仪。通过MATLAB拟合处理数据实现了对样品局部折射率和厚度高精度、高空间分辨率的实时测量,平面波导厚度测量精度可以达到纳米量级,空间分辨率可达到300 nm。该测量仪结构简单、易于操作,在光学传感和细胞内生物传感领域具有很高的应用价值。

Based on the basic principle that back focal plane imaging can determine the transmission properties, a polymer planar waveguide optical parameter measuring instrument is designed combining with Fresnel reflection theory of planar waveguides. The real time measurement of the local refractive index and thickness of the sample with high accuracy and high spatial resolution is realized by fitting data with MATLAB. The measurement accuracy of planar waveguide thickness can reach nanometer scale, and the spatial resolution can reach 300 nm. The instrument is simple in structure and easy to operate. It has high application value in optical sensing and intracellular biological sensing fields.