摘要
采用Zemax光学设计软件进行干涉模拟,建立传统菲索干涉仪结构;对标准镜调整和面形误差对测量结果的影响做出模拟分析,得出对标准镜引入倾斜将会带来像差;分析了标准镜前后表面面形误差对测量结果的影响。
In this paper, we simulate the interference with Zemax software, build the traditional Fizeau interferometer structure, and analyze the influence of standard mirror＇ s adjustment and surface error on measurement. We draw the conclusion that the tilt will introduce the comatic aberration. The influence of the front and the back surface of the standard mirror on the interfer- ence measurement are also analyzed.
出处
《大连民族大学学报》
2017年第3期237-239,共3页
Journal of Dalian Minzu University
基金
大连民族大学自主科研基金培育项目(DCPY2016011)
关键词
菲索干涉仪
标准镜
波像差
Fizeau interferometer
standard mirror
wavefront aberration
