虚拟切片无损测量精密进给系统误差补偿研究

Research on Error Compensation of Precision Feed System for Virtual Chip Nondestructive Measurement

虚拟切片无损测量装置可改进传统三维无损测量装置的不足,具有测量精度高、成本低、数据测量与处理快、可测量物体内部轮廓等优点。其中,精密进给系统是该装置的关键子系统,精密进给系统是影响片层质量精度的直接因素,同时也间接影响微小单元体质量的计算精度,因此,提高精密进给系统精度是优化基于虚拟切片无损测量装置的关键问题。通过对该装置精密进给系统的误差分析及误差补偿研究,实现精密进给系统误差均值从±0.008mm到±0.0056mm的优化,验证测量点中误差补偿成功率91.5%。验证结果证明误差补偿效果明显且稳定。

Virtual chip nondestructive measuring device can improve the shortcomings of the traditional 3D non-destructive measurement device, which has the advantages of high measuring precision, low cost, fast data measurement and processing, and can be used to measure the internal profile of the object. The precision feeding system is the key subsystem of the device, the precision feeding system is directly affect the sheet quality precision, but also indirectly affect the calculation accuracy of micro element body quality.To improve the accuracy of the precision feeding system is the key issues of the non-destructive measurement device based on virtual slice. Through to the device precision feeding system error analysis and error compensation analysis to achieve the optimization of precision feeding system error of the mean from （±0.008）mm to （±0.0056）mm.The successful rate of error compensation in the verification measurement points is 91.5%. The results show that the compensation effect is obvious and stable.