纳米ZnO的形貌、光致发光性质及反应气浓度分布的研究

A Study on the Morphology,Photoluminescence of Nanometer ZnO and Gas Concentration Distribution

采用化学气相沉积的实验方法,以纯Zn粉为锌源,O_2为反应气,N_2为载气,在双管管式炉内制备了多脚结构的纳米ZnO,研究了载气流量对产物形貌和光致发光性能的影响;通过计算流体动力学软件FLUENT对实验条件下管式炉内O_2和Zn蒸汽的浓度分布进行了模拟。实验和模拟结果表明:随着N2流量的增大,O_2浓度减小,产物由钉状多脚结构向针状多脚结构转变;沉积位置处Zn蒸汽的浓度远大于O_2浓度,绿光发射峰主要是由ZnO纳米晶体氧空位引起的,沉积反应主要由O_2控制。

The author of this paper has prepared nanometer ZnO in the double tube furnace by chemical vapor deposition（CVD） , with pure zinc powder as a source of zinc, 02 as a reac-tion gas and N2 as a carrier gas, and studied the effect of carrier gas flow rate on the mor-phology and photoluminescence of the produced nanometer ZnO. The concentration distri-bution of 02 and Zn vapor was simulated with FLUENT. The experiment and simulation re-sults show th a t with the increase of N2 flow ra te , 02 concentration decreases, and the prod-ucts changes from the nail-like multi-foot s tructure to the needle-like multi-foot s t ruc ture; the concentration of Zn vapor at the deposition site is much larger than th a t of O2 , the green emission peak is caused mainly by the vacancy of ZnO nanocrystals, and the deposition reac-tion is controlled mainly by O2.