石英微机械陀螺敏感芯片的结构解耦特性研究

Study on the Structure Decoupling Characteristic of the Sensitive Chip of Quartz MEMS Gyroscope

石英微机械陀螺敏感芯片通常采用双端音叉结构,驱动音叉和检测音叉的振动耦合误差是其主要误差源。对双端音叉结构陀螺敏感芯片进行了结构解耦设计仿真,分析了芯片安装区对检测音叉振动特性的影响。通过解耦设计,减小了零偏误差信号,提高了陀螺敏感芯片的稳定性。

The sensitive chip of quartz MEMS gyroscope usually adopts the double ended tuning fork structure.The vibration coupling error which comes from the drive and detection tuning forks is the main error source.The structure decoupling design and simulation of the sensitive chip with double-end tuning fork have been carried out in this paper.The impact of chip mounting area on the vibration characteristics of the detection tuning fork has been analyzed.The bias error signal of gyroscope has been reduced and the stability of the sensitive chip has been improved by using the proposed decoupling design.