倒圆角三角型两轴柔性支撑设计

Design of Fillet Triangle Two-axis Flexure Support

为提高压电陶瓷驱动的快速反射镜的回转精度,对倒圆角三角型柔性支撑进行研究。首先利用卡氏第二定理推导出倒圆角三角型柔性铰链柔度和回转精度理论计算公式;然后建立倒圆角三角型柔性铰链和两轴柔性支撑的有限元模型,并进行仿真分析得出柔度和回转精度的仿真值。将仿真值与理论值进行比较,其结果表明,最大误差在8%以内,验证了所推导公式的准确性。对比直圆型柔性支撑,在保证柔度的前提下,倒圆角三角型柔性支撑的回转精度提高了40%,具有重要的工程实用价值。

To improve the rotation accuracy of fast steering mirror(FSM)which is driven by PZT,the fillet triangle flexible support is investigated in this paper.First,the flexibility equations and rotation accuracy equations of the fillet triangle flexure hinge are deduced on the basis of the Castigliano's second theorem.After that,the finite element models of a fillet triangle flexure hinge and a fillet triangle two-axis flexure support are established to analyze the simulation results.The simulation values of the flexibility and rotation accuracy are obtained.Comparing simulation results with analytical solutions,we can conclude that the maximum error is less than 8%,which verifies the accuracy of the equations.The rotation accuracy of the fillet triangle two-axis flexure support has increased 40%compared with the circular flexure support under the premise in flexibility.The study has significant values for industrial applications.