摘要
以79g/mm的中阶梯衍射光栅为目标,研究衍射光栅机械刻划过程中铝膜的槽形隆起机制。首先,经过4次坐标变换,建立了光栅槽形的塑流剖面。然后,基于Lee and Shaffer提出的滑移线场模型,在塑流剖面内建立起包含滞留区域的滑移现场模型,并根据Dewhurst and Collins提出的矩阵算法对滑移线场进行求解,最终得到槽形隆起尺寸模型。最后,通过DEFORM软件对槽形隆起尺寸的演变规律进行模拟分析。
The echelle diffraction grating of 79g/mm is taken as the research object to reveal the mechanism of the lateral groove ridges on an aluminum film in the mechanical ruling process of diffraction gratings. Firstly, the plastic flow section of lateral grating groove ridges is determined after 4 coordinate transformations. Secondly, based on Lee and Shaffer＇ s model,the slip-line field model consisting of a stagnation zone is built up in the plastic flow section. And the prediction model of the lateral groove ridges is obtained according to Dewhurst and Collins＇ s matrix algorithm,. Lastly, by using the DEFORM software, the evolution rule of the lateral groove ridges of the diffraction grating is simulated and analyzed.
出处
《工具技术》
北大核心
2017年第5期108-111,共4页
Tool Engineering
基金
国家自然科学基金(51405031,51575057,51075042)
关键词
衍射光栅
隆起
塑流剖面
滑移线场
滞留区
diffraction grating
lateral ridge
plastic flow section
slip-line field model
stagnation zone
