电子级多晶硅生产线换热设备失效分析

Failure Analysis of Heat Exchangers in Electronic Grade Polycrystalline Silicon Production System

电子级多晶硅（10-12的纯度）生产线三氯氢硅精馏提纯所使用的冷凝器和再沸器,如果发生腐蚀、泄漏问题,所造成的危害非常大。发生泄漏后,三氯氢硅与冷却水（或蒸汽）发生放热化学反应,反应产物盐酸会加速腐蚀其它区域和其它设备,反应产物硅粉会堵塞设备。更换设备和清洗被污染的工艺管线,都非常繁重耗时,影响到正常的生产。本文对泄漏的主要原因进行分析。结合生产实际,对不同位置不同工况的换热器材质和选型提出优化建议。

In electronic grade polycrystalline silicon （10-12 purity ） production line, trichlorosilane fractionating system has lots of heat exchangers for evaporation and condensation. Those equipments are often in the trouble of corrosion and leakage, which once happens to be very huge harmful to the system operations and safeties. Even the smallest area leakage damage occurs, trichlorosilane meets with the water （or steam）, the reaction products hydrochloric acid will do fast to other areas, products silica fume will cause blocking. Recovering the system will cause long period and hard work, bring the user waste of time. In combination with the production practice, detailed analysis of those heat- exchangers failure were carried out and the optimization suggestions were provided.