N_2流量对等离子体增强磁控溅射TiN涂层的影响

Effect of N_2 Flow Rate on TiN Coatings Deposited by Plasma Enhanced Magnetron Sputtering

目的研究N_2流量对等离子体增强磁控溅射TiN涂层组织结构和性能的影响,优化TiN涂层的制备工艺。方法在不同N_2流量的条件下,采用等离子体增强磁控溅射法制备TiN涂层。采用3D形貌仪和扫描电子显微镜观察涂层的表面形貌,利用X射线衍射仪测定涂层的相结构,利用显微硬度计测试涂层试样的硬度,利用球-盘摩擦磨损试验机考察涂层试样的摩擦磨损性能,利用能谱仪分析磨痕表面的化学组成。结果 N_2流量小于61.5 mL/min时,增加N_2流量对总气压和靶电压的影响很小;N_2流量超过61.5 mL/min后,总气压和靶电压均随着N_2流量的增加而显著增大。随着N_2流量的增大,制备的TiN涂层X射线衍射谱中的TiN(111)、TiN(220)衍射峰强度不断增大,TiN(200)衍射峰强度先不变后突然减小。N_2流量约为61.5 mL/min时,制备的TiN涂层试样的致密性最好,硬度最高。N_2流量在50~61.5 mL/min范围内,制备的TiN涂层试样的磨损率较低,最低可达7.4×10^(-16) m^3/(N·m)。当N_2流量超过63 mL/min后,TiN涂层试样的磨损率显著增大。结论 N_2流量对等离子体增强磁控溅射TiN涂层择优取向、硬度及摩擦磨损性能的影响较显著,N_2流量约为61.5 mL/min时,制备的TiN涂层试样的硬度和耐磨性最好。

The work aims to optimize preparation technology of TiN coatings by studying effect of N2 flow rate on the mi- crostructure and properties of TiN coatings deposited by plasma enhanced magnetron sputtering. TiN coatings were prepared by plasma enhanced magnetron sputtering at different N2 flow rates. Surface morphology of the coatings was observed with 3D profilometer and scanning electron microscope, phase composition with X-ray diffractometer, hardness with a microhardness tester, friction and wear propertieswith ball-on-disk friction and wear tester, and chemical composition of griding cracks with energy disperse spectroscope. When N2 flow rate was less than 61.5 mL/min, total gas pressure and target voltage were slightly affected as N2 flow rate increased; but when N2 flow rate was over 61.5 mL/min, the total gas pressure and target voltage in- creased dramatically as N2 flow rate increased. With the increase of N2 flow rate, intensity of TIN（111） and TIN（220） diffraction peaks increased gradually while that of TIN（200） kept constant firstly and then declined sharply. The TiN-coated samples of the best compactness and highest hardness were obtained at the N2 flow rate of about 61.5 mL/min. The TiN-coated samples of wear rate as low as 7.4×10^-16 m^3/（N· m） were obtained at the N2 flow rate of 50 mL/min to 61.5 mL/min. However, wear rate of the TiN-coated samples increased significantly at the N2 flow rate of over 63 mL/min. Preferred orientation, hardness and fric- tion and wear properties of the TiN coatings deposited by plasma enhanced magnetron sputtering are obviously affected by N2 flow rate, and the best hardness and abrasion resistance can be obtained at the N2 flow rate of about 61.5 mL/min.