8MW单极性脉冲磁控溅射电源的设计

Design of 8 MW Unipolar Pulse Magnetron Sputtering Power Supply

设计了一种8 MW单极性脉冲磁控溅射电源,详细介绍了脉冲发生电路的拓扑结构及IGBT相关的关键技术。通过对所设计的8 MW单极性脉冲磁控溅射电源在Matlab中搭建Simulink模型进行数值仿真分析,然后在理论分析的基础上简化电路结构并搭建实验样机,在模拟负载条件下进行实验分析,得到了IGBT开关组均流、均压波形以及8 MW峰值功率输出波形,通过比较,实验结果与仿真数值分析波形基本一致。

A 8 MW unipolar pulse magnetron sputtering power supply is designed, detailing the pulse, generating cir- cuit topology and related key technologies of IGBT pulse generating circuit.By 8 MW unipolar pulse magnetron sput- tering power,a Simulink model is built in Matlab numerical simulation analysis.Based on the theoretical analysis of the simplified circuit structure ,a prototype is built and experimental analysis under simulated loading conditions to give the IGBT switch group average current, average voltage, and 8 MW peak power output waveforms.The simulation analysis and experimental waveforms are basically the same through the comparison.